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poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate) MeSH Supplementary Concept Data 2024


MeSH Supplementary
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)
Unique ID
C505215
RDF Unique Identifier
http://id.nlm.nih.gov/mesh/C505215
Entry Term(s)
poly(HOST-co-EAMA-co-PAG)
Registry Number
0
Heading Mapped to
*Polymethacrylic Acids
*Sulfonium Compounds
Frequency
1
Note
an EUV resist; structure in first source
Source
J Nanosci Nanotechnol 2005 Jul;5(7):1181-3
Date of Entry
2005/11/09
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate) Preferred
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