MeSH Browser

MeSH Heading: Micro-Electrical-Mechanical Systems
Tree Number(s): E07.305.343; J01.637.509
Unique ID: D055617
RDF Unique Identifier: http://id.nlm.nih.gov/mesh/D055617
Scope Note: A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
Entry Term(s): BioMEMS; MEMS; Micro-Electro-Mechanical Systems
NLM Classification #: QT 36.5
Public MeSH Note: 2009
History Note: 2009
Date Established: 2009/01/01
Date of Entry: 2008/07/08
Revision Date: 1955/01/01

Micro-Electrical-Mechanical Systems MeSH Descriptor Data 2024