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Micro-Electrical-Mechanical Systems MeSH Descriptor Data 2022


MeSH Heading
Micro-Electrical-Mechanical Systems
Tree Number(s)
E07.305.343
J01.637.509
Unique ID
D055617
RDF Unique Identifier
http://id.nlm.nih.gov/mesh/D055617
Scope Note
A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
Entry Term(s)
BioMEMS
MEMS
Micro-Electro-Mechanical Systems
NLM Classification #
QT 36.5
Public MeSH Note
2009
History Note
2009
Date Established
2009/01/01
Date of Entry
2008/07/08
Micro-Electrical-Mechanical Systems Preferred
BioMEMS Narrower
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