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Microtechnology MeSH Descriptor Data 2022


MeSH Heading
Microtechnology
Tree Number(s)
H01.570
J01.897.520.500
Unique ID
D055616
RDF Unique Identifier
http://id.nlm.nih.gov/mesh/D055616
Scope Note
Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.
Entry Term(s)
Microfabrication
Micromachining
Micromanufacturing
NLM Classification #
QT 36.5
Public MeSH Note
2009
History Note
2009
Date Established
2009/01/01
Date of Entry
2008/07/08
Revision Date
2008/10/16
Microtechnology Preferred
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